关键词:压电驱动;粘滑运动;柔顺机构;二自由度
中图分类号:TH122 文献标识码:A
doi:10.37188/OPE.20263404.0571 CSTR:32169.14.OPE.20263404.0571
Two-degree-of-freedom cross-scale stick-slip motion plat(试读)...